Light emitting diode with graphene layer

ABSTRACT

A light emitting diode includes a substrate, graphene layer, a first semiconductor layer, an active layer, a second semiconductor layer, a first electrode and a second electrode. The first semiconductor layer is on the epitaxial growth layer of the substrate. The active layer is between the first semiconductor layer and the second semiconductor layer. The first electrode is electrically connected with the second semiconductor layer and the second electrode electrically is connected with the second part of the carbon nanotube layer. The graphene layer is located on at least one of the first semiconductor layer and the second semiconductor layer.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application claims all benefits accruing under 35 U.S.C. §119 fromChina Patent Applications Application No. 201210122505.6, filed on Apr.25, 2012 in the China Intellectual Property Office, disclosures of whichare incorporated herein by references.

BACKGROUND

1. Technical Field

The present disclosure relates to a light emitting diode (LED) and amethod for making the same.

2. Description of the Related Art

LEDs are semiconductors that convert electrical energy into light.Compared to conventional light sources, the LEDs have higher energyconversion efficiency, higher radiance (i.e., LEDs emit a largerquantity of light per unit area than conventional light sources), longerlifetime, higher response speed, and better reliability. At the sametime, LEDs generate less heat. Therefore, LED modules are widely used aslight sources in optical imaging systems, such as displays, projectors,and so on.

A conventional LED commonly includes an N-type semiconductor layer, aP-type semiconductor layer, an active layer, an N-type electrode, and aP-type electrode. The active layer is located between the N-typesemiconductor layer and the P-type semiconductor layer. The P-typeelectrode is located on the P-type semiconductor layer. The N-typeelectrode is located on the N-type semiconductor layer. Typically, theP-type electrode is transparent. In operation, a positive voltage and anegative voltage are applied respectively to the P-type semiconductorlayer and the N-type semiconductor layer. Thus, holes in the P-typesemiconductor layer and electrons in the N-type semiconductor layer canenter the active layer and combine with each other to emit visiblelight.

However, extraction efficiency of LEDs is low because typicalsemiconductor materials have a higher refraction index than that of air.Large-angle light emitted from the active layer may be internallyreflected in LEDs, so that a large portion of the light emitted from theactive layer remains in the LEDs, thereby degrading the extractionefficiency.

What is needed, therefore, is a light emitting diode and a method formaking the same, which can overcome the above-described shortcomings.

BRIEF DESCRIPTION OF THE DRAWINGS

Many aspects of the embodiments can be better understood with referenceto the following drawings. The components in the drawings are notnecessarily drawn to scale, the emphasis instead being placed uponclearly illustrating the principles of the embodiments. Moreover, in thedrawings, like reference numerals designate corresponding partsthroughout the several views.

FIG. 1 is a flowchart of one embodiment a method for manufacturing aLED.

FIG. 2 is a schematic view of one embodiment of a graphene layer havinga plurality of hole shaped apertures.

FIG. 3 is a schematic view of one embodiment of a graphene layer havinga plurality of rectangular shaped apertures.

FIG. 4 is a schematic view of one embodiment of a graphene layer havingapertures of different shapes.

FIG. 5 is a schematic view of one embodiment of a plurality of subgraphene layers spaced from each other.

FIG. 6 is a Scanning Electron Microscope (SEM) image of a drawn carbonnanotube film.

FIG. 7 is a schematic structural view of a carbon nanotube segment ofthe drawn carbon nanotube film of FIG. 6.

FIG. 8 is an SEM image of cross-stacked drawn carbon nanotube films.

FIG. 9 is an SEM image of an untwisted carbon nanotube wire.

FIG. 10 is an SEM image of a twisted carbon nanotube wire.

FIG. 11 is a schematic view of a LED fabricated according to the methodof FIG. 1.

FIG. 12 is a flowchart of another embodiment a method for manufacturinga LED.

FIG. 13 is a three-dimensional view a LED fabricated according to themethod of FIG. 12.

FIG. 14 is a schematic, cross-sectional view, along a line XIV-XIV ofFIG. 13.

FIG. 15 is a flowchart of yet another embodiment a method formanufacturing a LED.

FIG. 16 is a schematic view of a LED fabricated according to the methodof FIG. 15.

FIG. 17 is a flowchart of yet another embodiment a method formanufacturing a LED.

FIG. 18 is a schematic view of a LED fabricated according to the methodof FIG. 17.

DETAILED DESCRIPTION

The disclosure is illustrated by way of example and not by way oflimitation in the figures of the accompanying drawings in which likereferences indicate similar elements. It should be noted that referencesto “an” or “one” embodiment in this disclosure are not necessarily tothe same embodiment, and such references mean at least one.

Referring to FIG. 1, a method of one embodiment for manufacturing alight emitting diode (LED) 10 includes the following steps:

-   -   step (10), providing a substrate 100 having an epitaxial growth        surface 101;    -   step (20), applying a graphene layer 110 on the epitaxial growth        surface 101;    -   step (30), growing a semiconductor epitaxial layer 104 including        a first semiconductor layer 120, an active layer 130 and a        second semiconductor layer 140;    -   step (40), exposing a part of the first semiconductor layer 120        by etching the semiconductor epitaxial layer 104; and    -   step (50), applying a first electrode 150 on the second        semiconductor layer 140 and a second electrode 160 on the        exposed part of the first semiconductor layer 120.

In step (10), the epitaxial growth surface 101 is used to grow thesemiconductor epitaxial layer 104. The epitaxial growth surface 101 is avery smooth surface. Oxygen and carbon are removed from the surface. Thesubstrate 100 can be a single layer structure or a multiple layerstructure. If the substrate 100 is a single layer structure, thesubstrate 100 can be a single-crystal structure. The single-crystalstructure includes a crystal face which is used as the epitaxial growthsurface 101. The material of the substrate 100 can be SOI (Silicon oninsulator), LiGaO₂, LiAlO₂, Al₂O₃, Si, GaAs, GaN, GaSb, InN, InP, InAs,InSb, AlP, AlAs, AlSb, AlN, GaP, SiC, SiGe, GaMnAs, GaAlAs, GaInAs,GaAlN, GaInN, AlInN, GaAsP, InGaN, AlGaInN, AlGaInP, GaP:Zn or GaP:N.The material of the substrate 100 is not limited, as long as thesubstrate 100 has an epitaxial growth surface 101 on which N-typesemiconductor layer 106 can grow. If the substrate 100 is a multiplelayer structure, the substrate 100 should include at least one layer ofthe single-crystal structure mentioned previously. The material of thesubstrate 100 can be selected according to N-type semiconductor layer106. In one embodiment, the lattice constant and thermal expansioncoefficient of the substrate 100 is similar to N-type semiconductorlayer 106 thereof in order to improve the quality of N-typesemiconductor layer 106. In another embodiment, the material of thesubstrate 100 is sapphire. The thickness, shape, and size of thesubstrate 100 are arbitrary and can be selected according to need.

In step (20), the graphene layer 110 can include graphene powders or atleast one graphene film. The graphene powders include a plurality ofdispersed graphene grains. The graphene film, namely a single-layergraphene, is a single layer of continuous carbon atoms. The single-layergraphene is a nanometer-thick two-dimensional analog of fullerenes andcarbon nanotubes. When the graphene layer 110 includes graphene powders,the graphene powders can be formed into a patterned structure by theprocess of dispersion, coating and etching. When the graphene layer 110includes the at least one graphene film, a plurality of graphene filmscan be stacked on each other or arranged coplanar side by side. Thegraphene film can be patterned by cutting or etching. The thickness ofthe graphene layer 110 can be in a range from about 1 nanometer to about100 micrometers. For example, the thickness of the graphene layer 110can be 1 nanometer, 10 nanometers, 200 nanometers, 1 micrometer, or 10micrometers. The single-layer graphene can have a thickness of a singlecarbon atom. In one embodiment, the graphene layer 110 is a puregraphene structure consisting of graphene.

The single-layer graphene has very unique properties. The single-layergraphene is almost completely transparent. The single-layer grapheneabsorbs only about 2.3% of visible light and allows most of the infraredlight to pass through. The thickness of the single-layer graphene isonly about 0.34 nanometers. A theoretical specific surface area of thesingle-layer grapheme is 2630 m²·g⁻¹. The tensile strength of thesingle-layer graphene is 125 GPa, and the Young's modulus of thesingle-layer graphene can be as high as 1.0 TPa. The thermalconductivity of the single-layer graphene is measured at 5300 W·m⁻¹·K⁻¹.A theoretical carrier mobility of the single-layer graphene is 2×10⁵cm²·V⁻¹·s⁻¹. A resistivity of the single-layer graphene is 1×10⁻⁶ Ω·cmwhich is about ⅔ of a resistivity of copper. Phenomenon of quantum Halleffects and scattering-free transmissions can be observed on thesingle-layer grapheme at room temperature.

In one embodiment, the graphene layer 110 is a patterned structure. Asshown in FIGS. 2-4, the term “patterned structure” means the graphenelayer 110 is a continuous structure and defines a plurality of apertures112. When the graphene layer 110 is located on the epitaxial growthsurface 101, part of the epitaxial growth surface 101 is exposed fromthe apertures 112 to grow the semiconductor epitaxial layer 104.

The shape of the aperture 112 is not limited and can be round, square,triangular, diamond or rectangular. The graphene layer 110 can have theapertures 112 of all the same shape or of different shapes. Theapertures 112 can be dispersed uniformly on the grapheme layer 102. Eachof the apertures 112 extends through the graphene layer 110 along thethickness direction. The apertures 112 can be hole shaped as shown inFIG. 2 or rectangular shaped as shown in FIG. 3. Alternatively, theapertures 112 can be a mixture of hole shaped and rectangular shaped inthe patterned graphene layer 110, as shown in FIG. 4. Hereafter, thesize of the aperture 112 is the diameter of the hole or width of therectangular. The sizes of the apertures 112 can be different. Theaverage size of the apertures 112 can be in a range from about 10nanometers to about 500 micrometers. For example, the sizes of theapertures 112 can be about 50 nanometers, 100 nanometers, 500nanometers, 1 micrometer, 10 micrometers, 80 micrometers, or 120micrometers. The smaller the sizes of the apertures 112, the lessdislocation defects will occur during the process of growing thesemiconductor epitaxial layer 104. In one embodiment, the sizes of theapertures 112 are in a range from about 10 nanometers to about 10micrometers. A dutyfactor of the graphene layer 110 is an area ratiobetween the sheltered epitaxial growth surface 101 and the exposedepitaxial growth surface 101. The dutyfactor of the graphene layer 110can be in a range from about 1:100 to about 100:1. For example, thedutyfactor of the graphene layer 110 can be about 1:10, 1:2, 1:4, 4:1,2:1, or 10:1. In one embodiment, the dutyfactor of the graphene layer110 is in a range from about 1:4 to about 4:1.

As shown in FIG. 5, the term “patterned structure” can also be aplurality of patterned graphene layers spaced from each other. Theaperture 112 is defined between adjacent two of the patterned graphenelayers. When the graphene layer 110 is located on the epitaxial growthsurface 101, part of the epitaxial growth surface 101 is exposed fromthe aperture 112 to grow the semiconductor epitaxial layer 104. In oneembodiment, the graphene layer 110 includes a plurality of graphenestrips placed in parallel with each other and spaced from each other asshown in FIG. 5.

The graphene layer 110 can be grown on the epitaxial growth surface 101directly, by transfer printing a preformed graphene film, or byfiltering and depositing a graphene suspension with graphene powdersdispersed therein. The graphene film can be made by chemical vapordeposition, exfoliating graphite, electrostatic deposition, pyrolysis ofsilicon carbide, epitaxial growth on silicon carbide, or epitaxialgrowth on metal substrates. The graphene powders can be made by graphiteoxide reduction, pyrolysis of sodium ethoxide, cutting carbon nanotube,carbon dioxide reduction method, or sonicating graphite.

In one embodiment, the graphene layer 110 of FIG. 2 can be made byfollowing steps:

-   -   step (201), providing a graphene film;    -   step (202), transferring the graphene film on the epitaxial        growth surface 101 of the substrate 100; and    -   step (203), patterning the graphene film.

In step (201), the graphene film is made by chemical vapor depositionwhich includes the steps of: (a1) providing a substrate; (b1) depositinga metal catalyst layer on the substrate; (c1) annealing the metalcatalyst layer; and (d1) growing the graphene film in a carbon sourcegas.

In step (a1), the substrate can be a copper foil or a Si/SiO₂ wafer. TheSi/SiO₂ wafer can have a Si layer with a thickness in a range from about300 micrometers to about 1000 micrometers and a SiO₂ layer with athickness in a range from about 100 nanometers to about 500 nanometers.In one embodiment, the Si/SiO₂ wafer has a Si layer with a thickness ofabout 600 micrometers and a SiO₂ layer with a thickness of about 300nanometers.

In step (b1), the metal catalyst layer can be made of nickel, iron, orgold. The thickness of the metal catalyst layer can be in a range fromabout 100 nanometers to about 800 nanometers. The metal catalyst layercan be made by chemical vapor deposition, physical vapor deposition,such as magnetron sputtering or electron beam deposition. In oneembodiment, a metal nickel layer of about 500 nanometers is deposited onthe SiO₂ layer.

In step (c1), the annealing temperature can be in a range from about900° C. to about 1000° C. The annealing can be performed in a mixture ofargon gas and hydrogen gas. The flow rate of the argon gas is about 600sccm, and the flow rate of the hydrogen gas is about 500 sccm. Theannealing time is in a range from about 10 minutes to about 20 minutes.

In step (d1), the growth temperature is in a range from about 900° C. toabout 1000° C. The carbon source gas is methane. The growth time is in arange from about 5 minutes to about 10 minutes.

In step (202), the transferring the graphene film includes the steps of:(a2) coating an organic colloid or polymer on the surface of thegraphene film as a supporter; (b2) baking the organic colloid or polymeron the graphene film; (c2) immersing the baked graphene film with theSi/SiO₂ substrate in deionized water so that the metal catalyst layerand the SiO₂ layer are separated to obtain a supporter/graphenefilm/metal catalyst layer composite; (d2) removing the metal catalystlayer from the supporter/graphene film/metal catalyst layer composite toobtain a supporter/graphene film composite; (e2) placing thesupporter/graphene film composite on the epitaxial growth surface 101;(f2) fixing the graphene film on the epitaxial growth surface 101 firmlyby heating; and (g2) removing the supporter.

In step (a2), the supporter material is poly (methyl methacrylate)(PMMA), polydimethylsiloxane, positive photoresist 9912, or photoresistAZ5206.

In step (b2), the baking temperature is in a range from about 100° C. toabout 185° C.

In step (c2), an ultrasonic treatment on the metal catalyst layer andthe SiO₂ layer can be performed after being immersed in deionized water.

In step (d2), the metal catalyst layer is removed by chemical liquidcorrosion. The chemical liquid can be nitric acid, hydrochloric acid,ferric chloride (FeCl₃), and ferric nitrate (Fe(NO₃)₃).

In step (g2), the supporter is removed by soaking the supporter inacetone and ethanol first, and then heating the supporter to about 400°C. in a protective gas.

In step (203), the method of patterning the graphene film can bephotocatalytic titanium oxide cutting, ion beam etching, atomic forcemicroscope etching, or the plasma etching. In one embodiment, an anodicaluminum oxide mask is placed on the surface of the graphene film, andthen the graphene film is etched by a plasma. The anodic aluminum oxidemask has a plurality of micropores arranged in an array. The part of thegraphene film corresponding to the micropores of the anodic aluminumoxide mask may be removed by the plasma etching, thereby obtaining agraphene layer 110 having a plurality of apertures.

In one embodiment, the graphene layer 110 of FIG. 5 can be made byfollowing steps:

-   -   step (204), making a graphene suspension with graphene powder        dispersed therein;    -   step (205), forming a continuous graphene coating on the        epitaxial growth surface 101 of the substrate 100; and    -   step (206), patterning the continuous graphene coating.

In step (204), the powder is dispersed in a solvent such as water,ethanol, N-methylpyrrolidone, tetrahydrofuran, or 2-nitrogendimethylacetamide. The graphene powder can be made by graphite oxidereduction, pyrolysis of sodium ethoxide, cutting carbon nanotube, carbondioxide reduction method, or sonicating graphite. The concentration ofthe suspension can be in a range from about 1 mg/ml to about 3 mg/ml.

In step (205), the suspension can be coated on the pitaxial growthsurface 101 of the substrate 100 by spinning coating. The rotating speedof spinning coating can be in a range from about 3000 r/min to about5000 r/min. The time for spinning coating can be in a range from about 1minute to about 2 minutes.

In step (206), the method of patterning the continuous graphene coatingcan be photocatalytic titanium oxide cutting, ion beam etching, atomicforce microscope etching, or the plasma etching.

In one embodiment, photocatalytic titanium oxide cutting is used topattern the continuous graphene coating. The method includes followingsteps:

-   -   step (2061), making a patterned metal titanium layer;    -   step (2062), heating and oxidizing the patterned metal titanium        layer to obtain a patterned titanium dioxide layer;    -   step (2063), contacting the patterned titanium dioxide layer        with the continuous graphene coating;    -   step (2064), irradiating the patterned titanium dioxide layer        with ultraviolet light; and    -   step (2065), removing the patterned titanium dioxide layer.

In step (2061), the patterned metal titanium layer can be formed byvapor deposition through a mask or photolithography on a surface of aquartz substrate. The thickness of the quartz substrate can be in arange from about 300 micrometers to about 1000 micrometers. Thethickness of the metal titanium layer can be in a range from about 3nanometers to about 10 nanometers. In one embodiment, the quartzsubstrate has a thickness of 500 micrometers, and the metal titaniumlayer has a thickness of 4 nanometers. The patterned metal titaniumlayer is a continuous titanium layer having a plurality of spacedstripe-shaped openings.

In step (2062), the patterned metal titanium layer is heated underconditions of about 500° C. to about 600° C. for about 1 hour to about 2hours. The heating can be performed in a furnace.

In step (2064), the ultraviolet light has a wavelength of about 200nanometers to about 500 nanometers. The patterned titanium dioxide layeris irradiated by the ultraviolet light in air or oxygen atmosphere witha humidity of about 40% to about 75%. The irradiating time is about 30minutes to about 90 minutes. Because the titanium dioxide is asemiconductor material with photocatalytic property, the titaniumdioxide can produce electrons and holes under ultraviolet lightirradiation. The electrons will be captured by the Ti (IV) of thetitanium surface, and the holes will be captured by the lattice oxygen.Thus, the titanium dioxide has strong oxidation-reduction ability. Thecaptured electrons and holes are easy to oxidize and reduce the watervapor in the air to produce active substance such as O₂ and H₂O₂. Theactive substance can decompose the graphene material easily.

In step (2065), the patterned titanium dioxide layer can be removed byremoving the quartz substrate. After removing the patterned titaniumdioxide layer, the patterned graphene layer 110 can be obtained. Thepattern of the patterned graphene layer 110 and the pattern of thepatterned titanium dioxide layer are mutually engaged with each other.Namely, the part of the continuous graphene coating corresponding to thepatterned titanium dioxide layer will be removed off.

In other embodiment, in step (2061), the patterned metal titanium layercan be formed by depositing titanium on a patterned carbon nanotubestructure directly. The carbon nanotube structure can be a carbonnanotube film or a plurality of carbon nanotube wires. The plurality ofcarbon nanotube wires can be crossed or weaved together to form a carbonnanotube structure. The plurality of carbon nanotube wires can also bearranged in parallel and spaced from each other to form a carbonnanotube structure. Because a plurality of apertures is formed in thecarbon nanotube film or between the carbon nanotube wires, the carbonnanotube structure can be patterned. The titanium deposited on thepatterned carbon nanotube structure can form a patterned titanium layer.In step (2062), the patterned titanium layer can be heated by applyingan electric current through the patterned carbon nanotube structure. Instep (2064), the part of the continuous graphene coating correspondingto the patterned carbon nanotube structure will be removed off to form aplurality of apertures 112. Because the diameter of the carbon nanotubeis about 0.5 nanometers to about 50 nanometers, the size of theapertures 112 can be several nanometers to tens nanometers. The size ofthe apertures 112 can be controlled by selecting the diameter of thecarbon nanotube.

The carbon nanotube structure is a free-standing structure. The term“free-standing structure” means that the carbon nanotube structure cansustain the weight of itself when it is hoisted by a portion A thereofwithout any significant damage to its structural integrity. That is, thecarbon nanotube structure can be suspended by two spaced supports. Thus,the process of patterning the continuous graphene coating can beoperated as follow. For example, first, depositing titanium layer on aplurality of parallel carbon nanotube wires; second, heating andoxidizing the titanium layer on the plurality of carbon nanotube wiresform titanium dioxide layer; third, arranging the plurality of carbonnanotube wires on the continuous graphene coating; fourth, irradiatingthe plurality of carbon nanotube wires with the ultraviolet light; lastremoving the plurality of carbon nanotube wires to obtain a graphenelayer 110 having a plurality of rectangular shaped apertures 112.

In one embodiment, the carbon nanotube structure includes at least onedrawn carbon nanotube film. A drawn carbon nanotube film can be drawnfrom a carbon nanotube array that is able to have a film drawntherefrom. The drawn carbon nanotube film includes a plurality ofsuccessive and oriented carbon nanotubes joined end-to-end by van derWaals attractive force therebetween. The drawn carbon nanotube film is afree-standing film. Referring to FIGS. 6-7, each drawn carbon nanotubefilm includes a plurality of successively oriented carbon nanotubesegments 113 joined end-to-end by van der Waals attractive forcetherebetween. Each carbon nanotube segment 113 includes a plurality ofcarbon nanotubes 115 parallel to each other, and combined by van derWaals attractive force therebetween. As can be seen in FIG. 6, somevariations can occur in the drawn carbon nanotube film. The carbonnanotubes 115 in the drawn carbon nanotube film are oriented along apreferred orientation. The drawn carbon nanotube film can be treatedwith an organic solvent to increase the mechanical strength andtoughness and reduce the coefficient of friction of the drawn carbonnanotube film. A thickness of the drawn carbon nanotube film can rangefrom about 0.5 nanometers to about 100 micrometers. The drawn carbonnanotube film can be attached to the epitaxial growth surface 101directly.

The carbon nanotube structure can include at least two stacked drawncarbon nanotube films. In other embodiments, the carbon nanotubestructure can include two or more coplanar carbon nanotube films, andcan include layers of coplanar carbon nanotube films. Additionally, whenthe carbon nanotubes in the carbon nanotube film are aligned along onepreferred orientation (e.g., the drawn carbon nanotube film), an anglecan exist between the orientation of carbon nanotubes in adjacent films,whether stacked or adjacent. Adjacent carbon nanotube films can becombined by only the van der Waals attractive force therebetween. Anangle between the aligned directions of the carbon nanotubes in twoadjacent carbon nanotube films can range from about 0 degrees to about90 degrees. When the angle between the aligned directions of the carbonnanotubes in adjacent stacked drawn carbon nanotube films is larger than0 degrees, a plurality of micropores is defined by the carbon nanotubestructure. Referring to FIG. 8, the carbon nanotube structure is shownwith the aligned directions of the carbon nanotubes between adjacentstacked drawn carbon nanotube films at 90 degrees. Stacking the carbonnanotube films will also add to the structural integrity of the carbonnanotube structure.

A step of heating the drawn carbon nanotube film can be performed todecrease the thickness of the drawn carbon nanotube film. The drawncarbon nanotube film can be partially heated by a laser or microwave.The thickness of the drawn carbon nanotube film can be reduced becausesome of the carbon nanotubes will be oxidized. In one embodiment, thedrawn carbon nanotube film is irradiated by a laser device in anatmosphere comprising of oxygen therein. The power density of the laseris greater than 0.1×10⁴ watts per square meter. The drawn carbonnanotube film can be heated by fixing the drawn carbon nanotube film andmoving the laser device at a substantially uniform speed to irradiatethe drawn carbon nanotube film. When the laser irradiates the drawncarbon nanotube film, the laser is focused on the surface of the drawncarbon nanotube film to form a laser spot. The diameter of the laserspot ranges from about 1 micron to about 5 millimeters. In oneembodiment, the laser device is carbon dioxide laser device. The powerof the laser device is about 30 watts. The wavelength of the laser isabout 10.6 micrometers. The diameter of the laser spot is about 3millimeters. The velocity of the laser movement is less than 10millimeters per second. The power density of the laser is 0.053×10¹²watts per square meter.

The carbon nanotube wire can be untwisted or twisted. Treating the drawncarbon nanotube film with a volatile organic solvent can form theuntwisted carbon nanotube wire. Specifically, the organic solvent isapplied to soak the entire surface of the drawn carbon nanotube film.During the soaking, adjacent parallel carbon nanotubes in the drawncarbon nanotube film will bundle together, due to the surface tension ofthe organic solvent as it volatilizes, and thus, the drawn carbonnanotube film will be shrunk into an untwisted carbon nanotube wire.Referring to FIG. 9, the untwisted carbon nanotube wire includes aplurality of carbon nanotubes substantially oriented along a samedirection (i.e., a direction along the length of the untwisted carbonnanotube wire). The carbon nanotubes are substantially parallel to theaxis of the untwisted carbon nanotube wire. More specifically, theuntwisted carbon nanotube wire includes a plurality of successive carbonnanotube segments joined end to end by van der Waals attractive forcetherebetween. Each carbon nanotube segment includes a plurality ofcarbon nanotubes substantially parallel to each other, and combined byvan der Waals attractive force therebetween. The carbon nanotubesegments can vary in width, thickness, uniformity, and shape. The lengthof the untwisted carbon nanotube wire can be arbitrarily set as desired.A diameter of the untwisted carbon nanotube wire ranges from about 0.5nanometers to about 100 micrometers.

The twisted carbon nanotube wire can be formed by twisting a drawncarbon nanotube film using a mechanical force to turn the two ends ofthe drawn carbon nanotube film in opposite directions. Referring to FIG.10, the twisted carbon nanotube wire includes a plurality of carbonnanotubes helically oriented around an axial direction of the twistedcarbon nanotube wire. More specifically, the twisted carbon nanotubewire includes a plurality of successive carbon nanotube segments joinedend to end by van der Waals attractive force therebetween. Each carbonnanotube segment includes a plurality of carbon nanotubes parallel toeach other, and combined by van der Waals attractive force therebetween.The length of the carbon nanotube wire can be set as desired. A diameterof the twisted carbon nanotube wire can be from about 0.5 nanometers toabout 100 micrometers. Further, the twisted carbon nanotube wire can betreated with a volatile organic solvent after being twisted to bundlethe adjacent paralleled carbon nanotubes together. The specific surfacearea of the twisted carbon nanotube wire will decrease, while thedensity and strength of the twisted carbon nanotube wire will increase.

The graphene layer 110 can be used as a mask for growing thesemiconductor epitaxial layer 104. The mask is the patterned graphenelayer 110 sheltering a part of the epitaxial growth surface 101 andexposing another part of the epitaxial growth surface 101. Thus, thesemiconductor epitaxial layer 104 can grow from the exposed epitaxialgrowth surface 101. The graphene layer 110 can form a patterned mask onthe epitaxial growth surface 101 because the patterned graphene layer110 defines a plurality of apertures 112. Compared to lithography oretching, the method of forming a patterned graphene layer 110 as mask issimple, low in cost, and will not pollute the substrate 100.

Furthermore, a buffer layer such as a low-temperature GaN layer, AlN,TiN or SiC layer can be grown on the epitaxial growth surface 101 beforestep (20). Thus, the quality of the semiconductor epitaxial layer 104can be improved through this step.

In step (30), the semiconductor epitaxial layer 104 grows via a processof molecular beam epitaxy (MBE), chemical beam epitaxy (CBE), vacuumepitaxy, low temperature epitaxy, choose epitaxy, liquid phasedeposition epitaxy (LPE), metal organic vapor phase epitaxy (MOVPE),ultra-high vacuum chemical vapor deposition (UHVCVD), hydride vaporphase epitaxy (HYPE), and metal organic chemical vapor deposition(MOCVD).

The semiconductor epitaxial layer 104 is a layer of single crystalstructure growing on the epitaxial growth surface 101. The material ofthe semiconductor epitaxial layer 104 can be the same as the substrate100. If the material is the same, the semiconductor epitaxial layer 104is the homoepitaxial layer, otherwise the semiconductor epitaxial layer104 is the heteroepitaxial layer. The material of the semiconductorepitaxial layer 104 can be Si, GaAs, GaN, GaSb, InN, InP, InAs, InSb,AlP, AlAs, AlSb, A1N, GaP, CuP, SiC, SiGe, GaMnAs, GaAlAs, GaInAs,GaAlN, GaInN, AlInN, GaAsP, InGaN, AlGaInN, AlGaInP, GaP:Zn, or GaP:N.

The first semiconductor layer 120 and the second semiconductor layer 140are a doped semiconductor epitaxial layer such as an N-typesemiconductor layer or a P-type semiconductor layer. The N-typesemiconductor layer is configured to produce electrons and the P-typesemiconductor layer is configured to produce holes. The active layer 130is a photon excitation layer and can be one of a single layer quantumwell film or multilayer quantum well films. The material of the quantumwell can be indium gallium nitride, indium gallium aluminum nitride,gallium arsenide, aluminum gallium arsenide, indium phosphide, gallium,indium phosphide, arsenic, or indium arsenide and gallium. The firstsemiconductor layer 120, the active layer 130, and the secondsemiconductor layer 140 are stacked on the epitaxial growth surface 101.The active layer 130 is sandwiched between the first semiconductor layer120 and the second semiconductor layer 140.

The thickness of the first semiconductor layer 120 can be in a rangefrom about 0.5 nanometers to about 5 micrometers. For example, thethickness of the first semiconductor layer 120 can be about 10nanometers, 100 nanometers, 1 micrometer, 2 micrometers, or 3micrometers. The thickness of the second semiconductor layer 140 can bein a range from about 0.1 micrometers to about 3 micrometers. Forexample, the thickness of the second semiconductor layer 140 can beabout 0.3 micrometers, 1 micrometer, 2 micrometers, or 3 micrometers.The thickness of the active layer 130 can be in a range from about 0.1micrometers to about 0.5 micrometers. In one embodiment, the thicknessof the active layer 130 is about 0.3 micrometers.

In one embodiment, the first semiconductor layer 120 is a Si dopedN-type GaN layer, the active layer 130 is a composite layer of InGaN/GaNand the second semiconductor layer 140 is a Mg doped P-type GaN layer.The substrate 100 is sapphire substrate. The semiconductor epitaxiallayer 104 is grown on the sapphire substrate by MOCVD method. Thesemiconductor epitaxial layer 104 is doped via introducing differentdoped gas into the source gas. The first semiconductor layer 120, theactive layer 130 and the second semiconductor layer 140 can grow inseries by changing the doped gas and controlling the grow time.

In example, the nitrogen source gas is high-purity ammonia (NH₃), the Gasource gas is trimethyl gallium (TMGa) or triethyl gallium (TEGa), theSi source gas is silane (SiH₄), the Mg source gas is ferrocene magnesium(Cp₂Mg), the In source gas trimethyl indium (TMIn), and the carrier gasis hydrogen (H₂) or nitrogen (N₂). The growth of the epitaxial layerincludes the following steps:

-   -   step (301), locating the sapphire substrate 100 with the        graphene layer 110 thereon into a reaction chamber, heating the        sapphire substrate 100 to about 1100° C. to about 1200° C.,        introducing the carrier gas, and baking the sapphire substrate        for about 200 seconds to about 1000 seconds;    -   step (302), growing a low-temperature GaN buffer layer with a        thickness of about 10 nanometers to about 50 nanometers by        cooling down the temperature of the reaction chamber to a range        from about 500° C. to 650° C. in the carrier gas atmosphere, and        introducing the Ga source gas and the nitrogen source gas at the        same time;    -   step (303), stopping the flow of the Ga source gas while        maintaining the flow of the carrier gas and nitrogen source gas        atmosphere, increasing the temperature to a range from about        1100° C. to about 1200° C., and annealing for about 30 seconds        to about 300 seconds;    -   step (304), maintaining the temperature of the reaction chamber        in a range from about 1000° C. to about 1100° C., and        reintroducing the Ga source gas and Si source gas to grow a high        quality Si doped N-type GaN epitaxial layer as the first        semiconductor layer 120;    -   step (305), stopping the flow of the Si source gas, changing the        temperature of the reaction chamber to about 700° C. to about        900° C., and changing the pressure of the reaction chamber on        about 50 Torr to about 500 Torr;    -   step (306), introducing the In source gas into the reaction        chamber to grow multilayer quantum well of InGaN/GaN as the        active layer 130 while maintaining temperature and pressure of        the reaction chamber in step (305);    -   step (307), stopping the flow of the In source gas, changing the        temperature of the reaction chamber to about 1000° C. to about        1100° C., and changing the pressure of the reaction chamber on        about 76 Torr to about 200 Torr; and    -   step (308), introducing the Mg source gas into the reaction        chamber to grow a high quality Mg doped P-type GaN epitaxial        layer as the second semiconductor layer 140 while maintaining        temperature and pressure of the reaction chamber in step (307)

In step (304), the growth of the first semiconductor layer 120 caninclude the following stages:

-   -   stage (3041) growing a plurality of epitaxial crystal nucleus on        the epitaxial growth surface 101, and forming from the epitaxial        crystal nucleus a plurality of epitaxial crystal grains along        the direction substantially perpendicular to the epitaxial        growth surface 101;    -   stage (3042) growing from the plurality of epitaxial crystal        grains a continuous epitaxial film along the direction        substantially parallel to the epitaxial growth surface 101; and    -   stage (3043) forming the N-type first semiconductor layer 120 by        growing continuously the epitaxial film along the direction        substantially perpendicular to the epitaxial growth surface 101.

In stage (3041), because the graphene layer 110 is placed on theepitaxial growth surface 101, the epitaxial crystal grains can only growon the epitaxial growth surface 101 which are exposed out of thegraphene layer 110 through the apertures 112. The growth direction ofthe epitaxial crystal grains is substantially perpendicular to thesurface of the epitaxial growth surface 101.

In stage (3042), the epitaxial crystal grains can grow out of theapertures 112 of the graphene layer 110 along the directionsubstantially parallel to the epitaxial growth surface 101. Thus theepitaxial crystal grains will form an integrated structure such as theepitaxial film. During this process, the epitaxial film defines apatterned depression 122 on the surface adjacent to the epitaxial growthsurface 101. The patterned depression 122 is related to the patternedgraphene layer 110. If the graphene layer 110 includes a plurality ofgraphene strips located in parallel with each other and spaced from eachother, the patterned depression 122 is a plurality of parallel andspaced grooves. If the graphene layer 110 includes a plurality ofgraphene strips crossed or weaved together to form a net, the patterneddepression 122 is a groove network including a plurality of intersectedgrooves. The graphene layer 110 can prevent lattice dislocation betweenthe epitaxial crystal grains and the substrate 100 from growing. Theprocess of epitaxial crystal grains growing along the directionsubstantially parallel to the epitaxial growth surface 101 is calledlateral epitaxial growth.

In stage (3043), the dislocation between the epitaxial crystal grainsand the substrate 100 will be reduced, and the quality of the epitaxialfilm will be improved, because of the graphene layer 110. The firstsemiconductor layer 120 homoepitaxially grows on the epitaxial film,thus the first semiconductor layer 120 includes less defects.Furthermore, the quality of the active layer 130 and the secondsemiconductor layer 140 in following steps will also be improved.

In step (40), the semiconductor epitaxial layer 104 can be etched by thefollowing steps:

-   -   step (401) coating a layer of photo resist uniformly on the        semiconductor epitaxial layer 104;    -   step (402) prebaking the photo resist in a temperature ranging        from about 80° C. to about 100° C. for about 20 minutes to about        30 minutes;    -   step (403) exposing and developing the photo resist;    -   step (404) baking the photo resist in a temperature ranging from        about 100° C. to about 150° C. for about 20 minutes to about 30        minutes;    -   step (405) corroding the semiconductor epitaxial layer 104 to        form a predetermined figure; and    -   step (406) removing the photo resist by immersing the photo        resist into a solvent.

The step (403) can further include the following substeps:

-   -   step (4031) placing a mask layer on the surface of the        semiconductor epitaxial layer 104;    -   step (042) irradiating the semiconductor epitaxial layer 104        using ultraviolet;    -   step (4043) immersing the semiconductor epitaxial layer 104 into        a developer for about 30 minutes to obtain a patterned photo        resist.

In step (50), the first electrode 150 and the second electrode 160 canbe an N-type electrode or a P-type electrode. The thickness of the firstelectrode 150 and the second electrode 160 ranges from about 0.01micrometers to about 2 micrometers. The material of the first electrode150 and the second electrode 160 can be titanium (Ti), silver (Ag),aluminum (Al), nickel (Ni), gold (Au), or any combination of them. Thematerial of the first electrode 150 and the second electrode 160 canalso be indium-tin oxide (ITO), graphene film or carbon nanotube film.The first electrode 150 can cover the entire surface or a part of thesurface of the second semiconductor layer 140. The first electrode 150and the second electrode 160 can be made by an etching process with amask layer.

When the material of the first electrode 150 and the second electrode160 is a metal or alloy, the material can be selected separatelyaccording to the semiconductor layer electrically connected with thefirst electrode 150. Thus the contact resistance will be reduced. Thefirst electrode 150 and the second electrode 160 can be deposited via aprocess of physical vapor deposition, such as electron beam evaporation,vacuum evaporation, ion sputtering, or any physical deposition. Whilethe light is extracted from the second semiconductor layer 140, thefirst electrode 150 should only cover a part of the surface of thesecond semiconductor layer 140. The ratio of the surface of the secondsemiconductor layer 140 which is covered by the first electrode 150 in arange from about 10% to about 15%. The second electrode 160 covers partof the exposed first semiconductor layer 120.

When the material of the first electrode 150 and the second electrode160 is ITO, the first electrode 150 and the second electrode 160 can bedeposited via magnetron sputtering, evaporation, spraying, or sol-gelmethod. The first electrode 150 can cover the entire surface of thesecond semiconductor layer 140, and the second electrode 160 can alsocover the entire exposed first semiconductor layer 120.

In one embodiment, the first electrode 150 comprises an Au film of 15nanometers and a Ti film of 100 nanometers. The second electrode 160comprises an Au film of 15 nanometers and a Ti film of 200 nanometers.

In another embodiment, the graphene layer 110 can be placed between thefirst semiconductor layer 120 and the active layer 130 or between theactive layer 130 and the second semiconductor layer 140. When thegraphene layer 110 is placed on a surface of the active layer 130adjacent to the first semiconductor layer 120, the first semiconductorlayer 120 will form a patterned depression 122 on a surface adjacent tothe active layer 130.

The method for making the LED 10 has many advantages. The graphene layer110 can be directly formed on the substrate 100 to grow a semiconductorepitaxial layer 104. The process is simple and the complex sputteringand etching process is avoided. A plurality of microstructures can alsobe formed on the semiconductor epitaxial layer 104 by using graphenelayer 110 as the mask layer, thereby avoiding any complex etchingprocess. The apertures in the graphene layer 110 and the microstructuresare sufficiently small such that the light extraction efficiency isimproved.

Referring to FIG. 11, a LED 10 of one embodiment includes a substrate100, a graphene layer 110, a first semiconductor layer 120, an activelayer 130, and a second semiconductor layer 140, a first electrode 150,and a second electrode 160.

The substrate 100 includes an epitaxial growth surface 101. The graphenelayer 110 is placed on the epitaxial growth surface 101. The firstsemiconductor layer 120, the active layer 130, and the secondsemiconductor layer 140 are stacked on the same side of the epitaxialgrowth surface 101 in that order. The graphene layer 110 is sandwichedbetween the first semiconductor layer 120 and the substrate 100. Thefirst electrode 150 is electrically connected with the secondsemiconductor layer 140. The second electrode 160 is electricallyconnected with the first semiconductor layer 120.

The graphene layer 110 is a continuous and integrated structure. Thegraphene layer 110 defines a plurality of apertures 112. The substrate100 is partly exposed to the semiconductor epitaxial layer 104 from theapertures 112. The first semiconductor layer 120 penetrates the graphenelayer 110 through the apertures 112 and connects with the substrate 100.Thus, the first semiconductor layer 120 is located on the substrate 100through the apertures 112. The surface of the first semiconductor layer120, which is connected with the substrate 100 has a patterneddepression 122 including a plurality of parallel and spaced grooves or aplurality of intersected grooves. The graphene layer 110 is embedded inthe patterned depression 122.

In use, the first semiconductor layer 120 is an N-type semiconductorlayer configured to provide electrons, and the second semiconductorlayer 140 is a P-type semiconductor layer configured to provide holes.The active layer 130 is configured to provide photons. The firstelectrode 150 and the second electrode 160 are configured to apply avoltage. The first electrode 150 is used as the upper electrode of theLED 10, and the second electrode 160 is used as the lower electrode.When the light excited from the active layer 130 reaches the interfacebetween the first semiconductor layer 120 and the substrate 100 at asufficiently large incident angle, the light will be scattered. Theextracting direction of the light will be changed by the grooves of thepatterned depression 122 and the graphene layer 110, thus the light canbe extracted from the LED 10, and the light extraction efficiency willbe improved.

Referring to FIG. 12, a method for manufacturing a LED 20 includes thefollowing steps:

-   -   step (10A), providing a substrate 100 having an epitaxial growth        surface 101;    -   step (20A), applying a graphene layer 110 on the epitaxial        growth surface 101;    -   step (30A), growing a semiconductor epitaxial layer 104        including a first semiconductor layer 120, an active layer 130        and a second semiconductor layer 140;    -   step (40A), exposing a part of the graphene layer 110 by etching        the semiconductor epitaxial layer 104; and    -   step (50A), applying a first electrode 150 on the second        semiconductor layer 140 and a second electrode 160 on the        exposed part of the graphene layer 110.

The method for manufacturing the LED 20 is similar to the method formanufacturing the LED 10 above except that part of the graphene layer110 is exposed in step (40A) and the second electrode 160 iselectrically connected with the exposed part of the graphene layer 110in step (50A).

Referring to FIGS. 13 and 14, a LED 20 of one embodiment includes asubstrate 100, a graphene layer 110, a first semiconductor layer 120, anactive layer 130, and a second semiconductor layer 140, a firstelectrode 150, and a second electrode 160.

The LED 20 is similar to the LED 10 above except that the secondelectrode 160 is electrically connected with the exposed part of thegraphene layer 110. The graphene layer 110 is electrically connected tothe first semiconductor layer 120. Because the excellent conductivity ofthe graphene layer 110, the graphene layer 110 and second electrode 160can be used as the lower electrode of the LED 20 together. The firstelectrode 150 is used as the upper electrode of the LED 20. In oneembodiment, the graphene layer 110 includes a plurality of graphenestrips with each having part exposed from the semiconductor epitaxiallayer 104. The second electrode 160 is electrically connected to each ofthe plurality of graphene strips. The second electrode 160 can beomitted and the graphene layer 110 can be used as the lower electrode ofthe LED 20 directly because of the excellent conductivity of thegraphene layer 110.

When applying a voltage between the first electrode 150 and the secondelectrode 160, the current flows from the upper electrode to the lowerelectrode vertically. Thus the LED 20 forms in a vertical structure LED.The light can be extracted from the second semiconductor layer 140. Ifthe first electrode 150 is transparent, the first electrode 150 cancover the entire surface of the second semiconductor layer 140.

Referring to FIG. 15, a method for manufacturing a LED 30 includes thefollowing steps:

-   -   step (10B), providing a substrate 100 having an epitaxial growth        surface 101;    -   step (20B), growing a first semiconductor layer 120 on the        epitaxial growth surface 101;    -   step (30B), applying a graphene layer 110 on the first        semiconductor layer 120;    -   step (40B), growing the first semiconductor layer 120 again to        enclose the graphene layer 110, and growing an active layer 130        and a second semiconductor layer 140 on the first semiconductor        layer 120;    -   step (50B), exposing a part of the first semiconductor layer 120        by etching the semiconductor epitaxial layer 104; and    -   step (60B), applying a first electrode 150 on the second        semiconductor layer 140 and a second electrode 160 on the        exposed part of the first semiconductor layer 120.

The method for manufacturing the LED 30 is similar to the method formanufacturing the LED 10 above except that the first semiconductor layer120 is grown by two steps so that the graphene layer 110 is enclosed inthe first semiconductor layer 120. In another embodiment, the graphenelayer 110 can be enclosed in the second semiconductor layer 140.

Referring to FIG. 16, a LED 30 of one embodiment includes a substrate100, a graphene layer 110, a first semiconductor layer 120, an activelayer 130, and a second semiconductor layer 140, a first electrode 150,and a second electrode 160.

The LED 30 is similar to the LED 10 above except that the graphene layer110 is enclosed in the first semiconductor layer 120. The firstsemiconductor layer 120 has a plurality of chambers 124 and the graphenelayer 110 is located in the plurality of chambers 124. In anotherembodiment, the graphene layer 110 can be enclosed in the secondsemiconductor layer 140.

Referring to FIG. 17, a method for manufacturing a LED 40 includes thefollowing steps:

-   -   step (10C), providing a substrate 100 having an epitaxial growth        surface 101;    -   step (20C), growing a first semiconductor layer 120 on the        epitaxial growth surface 101;    -   step (30C), applying a graphene layer 110 on the first        semiconductor layer 120;    -   step (40C), growing the first semiconductor layer 120 to        semi-enclose the graphene layer 110;    -   step (50C), growing an active layer 130 and a second        semiconductor layer 140 on the first semiconductor layer 120;    -   step (60C), exposing a part of the first semiconductor layer 120        by etching the semiconductor epitaxial layer 104; and    -   step (70C), applying a first electrode 150 on the second        semiconductor layer 140 and a second electrode 160 on the        exposed part of the first semiconductor layer 120.

The method for manufacturing the LED 40 is similar to the method formanufacturing the LED 10 above except that the first semiconductor layer120 only semi-enclose the graphene layer 110 by controlling the growingtime in step (40C). That is, a patterned depression 122 is formed on thefirst semiconductor layer 120 so that the graphene layer 110 is embeddedin the depression 122 of the first semiconductor layer 120. In anotherembodiment, the depression 122 can be formed on a surface of the secondsemiconductor layer 140 away from the active layer 130, and the graphenelayer 110 can be embedded in the depression 122 of the secondsemiconductor layer 140. The second electrode 160 in not in contact withthe graphene layer 110.

Referring to FIG. 18, a LED 40 of one embodiment includes a substrate100, a graphene layer 110, a first semiconductor layer 120, an activelayer 130, and a second semiconductor layer 140, a first electrode 150,and a second electrode 160.

The LED 40 is similar to the LED 10 above except that the graphene layer110 is located on a surface of the first semiconductor layer 120adjacent to the active layer 130. The first semiconductor layer 120 andthe active layer 130 define a plurality of chambers 124 and the graphenelayer 110 is located in the plurality of chambers 124. In anotherembodiment, the graphene layer 110 can be located on a surface of thesecond semiconductor layer 140 away from the active layer 130. Thesemiconductor layer 140 has a patterned depression 122 on the surfaceaway from the active layer 130. The graphene layer 110 is embedded inthe depression 122 of the second semiconductor layer 140. The firstelectrode 150 can be omitted and the graphene layer 110 can be used asthe upper electrode of the LED 40 directly because of the excellentconductivity of the graphene layer 110.

Depending on the embodiment, certain of the steps of methods describedmay be removed, others may be added, and the sequence of steps may bealtered. The description and the claims drawn to a method may includesome indication in reference to certain steps. However, the indicationused is only to be viewed for identification purposes and not as asuggestion as to an order for the steps.

The above-described embodiments are intended to illustrate rather thanlimit the disclosure. Variations may be made to the embodiments withoutdeparting from the spirit of the disclosure as claimed. Any element ofany one embodiment is considered to be disclosed to be incorporated withany other embodiment. The above-described embodiments illustrate thescope of the disclosure but do not restrict the scope of the disclosure.

What is claimed is:
 1. A light emitting diode, comprising: a substratecomprising an epitaxial growth surface; a semiconductor epitaxial layeron the epitaxial growth surface of the substrate, wherein thesemiconductor epitaxial layer comprises a first semiconductor layer, anactive layer and a second semiconductor layer, the active layer isbetween the first and the second semiconductor layer, and the firstsemiconductor layer is on the epitaxial growth surface of the substrate;a first electrode electrically connected with the second semiconductorlayer; a second electrode electrically connected with the firstsemiconductor layer; and a first graphene layer fully enclosed in thefirst semiconductor layer, wherein the first graphene layer is suspendedabove, and spaced from, the epitaxial growth surface.
 2. The lightemitting diode of claim 1, wherein the first graphene layer is astructure consisting of graphene.
 3. The light emitting diode of claim1, wherein a thickness of the first graphene layer is in a range fromabout 1 nanometer to about 100 micrometers.
 4. The light emitting diodeof claim 1, wherein the first graphene layer comprises a graphene filmconsisting of a single layer of continuous carbon atoms.
 5. The lightemitting diode of claim 4, wherein the first graphene layer has athickness of a thickness of a single layer of carbon atoms.
 6. The lightemitting diode of claim 1, wherein the first graphene layer is a coatingcomprising graphene powders.
 7. The light emitting diode of claim 1,wherein the first graphene layer is patterned and defines a plurality offirst apertures.
 8. The light emitting diode of claim 7, wherein sizesof the plurality of first apertures are in a range from about 10nanometers to about 500 micrometers.
 9. The light emitting diode ofclaim 8, wherein the sizes of the plurality of first apertures are in arange from about 10 nanometers to about 10 micrometers.
 10. The lightemitting diode of claim 7, wherein a dutyfactor of the first graphenelayer is in a range from about 1:100 to about 100:1, wherein thedutyfactor is an area ratio between a covered area to an exposed area ofthe epitaxial growth surface.
 11. The light emitting diode of claim 10,wherein the dutyfactor of the first graphene layer is in a range fromabout 1:4 to about 4:1.
 12. The light emitting diode of claim 7, whereinthe first semiconductor layer extends through the plurality of firstapertures and is in direct contact with the epitaxial growth surface ofthe substrate.
 13. The light emitting diode of claim 1, wherein thefirst semiconductor layer defines a plurality of chambers, and the firstgraphene layer is received in the plurality of chambers.
 14. The lightemitting diode of claim 1, further comprising a second grapheme layerlocated between the active layer and the first semiconductor layer, thesecond graphene layer defines a plurality of second apertures, and thefirst semiconductor layer extends through the plurality of secondapertures and is in direct contact with the active layer.
 15. The lightemitting diode of claim 1, further comprising a third graphene layerlocated between the active layer and the second semiconductor layer, thethird graphene layer defines a plurality of third apertures, and thesecond semiconductor layer extends through the plurality of thirdapertures and is in direct contact with the active layer.
 16. The lightemitting diode of claim 1, further comprising a fourth graphene layer ona surface of the second semiconductor layer that is spaced from theactive layer.
 17. The light emitting diode of claim 1, wherein the firstsemiconductor layer is made of a single material.